Inspection Solution
![Dark Field Wafer Defect Inspection System DI2800](/ca/en/media/semi-di2800_main_png_tcm35-29896.png)
Dark Field Wafer Defect Inspection System DI2800
Contributes to the detection and management of defects that occur on pattern samples during the manufacturing process of G & C devices.
![Dark Field Wafer Defect Inspection System IS Series](/ca/en/media/semi-is_main_tcm35-29904.png)
Dark Field Wafer Defect Inspection System DI4600
Delivering high detection sensitivity and high inspection throughput which enables yield improvement and production cost reduction.
![Wafer Surface Inspection System LS Series](/ca/en/media/semi-ls_main_jpg_tcm35-29906.jpg)
Wafer Surface Inspection System LS Series
Wafer surface inspection system to detect various types of small defects on non-patterned wafer of next generation device.