SEMICON JAPAN/APCS 2024
Invitation to the Hitachi High-Tech Group Booth
Hitachi High-Tech supports semiconductor manufacturing from the fundamental aspect of 'knowing' through technologies that "Processing, Observation, Measurement, and Analysis".
Hitachi High-Tech Corporation
Hitachi High-Tech Solutions Corporation
Date
December 11-13, 2024
10:00am – 5:00pm
Venue
Tokyo Big Sight
Organizer
SEMI Japan
Entrance Fee
Exhibition: Free need to registration
Hitachi High-Tech Group Booth
East Hall Hall 4：4946
Exhibitor seminars (Free)
Date
Dec. 14 13:30～14:20
Venue
East Hall 4 (EXHIBITOR'S TechSPOT Hall4)
Theme
「Hitachi High-Tech Corporation Introduction of G&C products proposed by Hitachi High-Tech through remote demonstration」
VIRVUAL Exhibition Products
Conductor Etch System M-600Series
Conductor Etch System 9000Series / 9060Series
G＆C (CS,CT,DI)
Mirror Electron Inspection System Mirelis VM1000
Hitachi Dark Field Wafer Defect Inspection System DI4600
Defect Review SEM CR7300 Series
Advanced Area Inspection SEM GS1000
Advanced CD Measurement GT2000
High Voltage CD-SEM CV7300
2D Inline Monitoring System
Design Based Metrology System : RecipeDirector/DesignGauige-AnalyzerPlus
Wafer Bump X-ray Inspection System TUX-8000 Series
X-ray (XRF) Coating Thickness Gauge FT160 Series
Sustainable Maintenance Support
FE-SEM (Field Emission Scanning Electron Microscopes)
For more information, please check SEMICON Japan 2024.