Wet Station
![Wet Station](/global/en/media/index_main_jpg_tcm27-25624.jpg)
We have 3 solutions for variety of substrates.
![-](/global/en/media/msp-1_main_jpg_tcm27-25643.jpg)
Spin Processor (MSP-1)
This spin processor is suitable for R&D and small production.
All processes from chemical process to dryer are in one cup.
![-](/global/en/media/batch_main_jpg_tcm27-25634.jpg)
Multi batch type wet station
Our system has batch type cleaning ,resist stripping and etching potions.
All processes from chemical cleaning to dryer are fully automated.
![-](/global/en/media/msp-2_main_jpg_tcm27-25651.jpg)
Multi Spin Processor (MSP-2)
Multi spin processor is suitable for mass production and Multi complex process.
Configuration of our Wet station
Function | Spin unit | Function unit | Option |
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Resist strip | |||
Mask blanks |
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Post-CMP cleaner | |||
Light emitting diode |
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SiC wafer cleaning |
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Spin etcher |
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Spin unit
Ultrasonic cleaning unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_04.jpg)
Air mist nozzle unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_05.jpg)
Brush scrub unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_06.jpg)
Chemical CUP unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_07.jpg)
Organic solvent unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_08.jpg)
N2ion blow unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_09.jpg)
Function unit
Both side scrub unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_10.jpg)
Beveled edge scrub unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_11.jpg)
Bake unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_12.jpg)
UV lamp cleaning unit
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_13.jpg)
Wafer reversing mechanism
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_14.jpg)
Underwater loader
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_15.jpg)
Spin chuck sensor
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_16.jpg)
Option
Electrical conductivity control system by de-ionized water/CO2 membrane
Antistatics for substrate
![-](/global/en/media/index_17_jpg_tcm27-82807.jpg)
Chemical supply system
Concentration management by chemical tank weight
![-](/global/en/media/index_18_jpg_tcm27-82808.jpg)
Traceability system
This system gathers LotNo.,recipe,time,temperature,concentration,electric energy and so on.
![-](/global/en/media/index_19_jpg_tcm27-82809.jpg)
Chemical solution recycling system
Recycling system by filter
![-](/global/en/media/index_20_jpg_tcm27-82810.jpg)
Others
IPA vapor dryer
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_21.jpg)
Tool cleaner
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_22.jpg)
Clean oven
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_23.jpg)
Wafer transfer
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_24.jpg)
Tool desiccator
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_25.jpg)
Organic fume hood
![](/image/hsl/products/industry/manufacturing_equipment/wet_station/index_26.jpg)