Scanning Electron Microscopes SU3800/SU3900

Feature

• The specimen exchange sequence prevents potential damage to the system or the sample.
  The procedure for exchanging specimens can be performed by referring to the graphic user interface to avoid the risk of damage due to human error, even with irregular or large samples.

• Specimen Exchange Chamber*
  Exchange the specimen without venting the specimen chamber, improving throughput.

• Increase sample manipulation with the Stage Movement Restriction Cancellation function*.
  The SU3800/SU3900 can be configured with the Stage Movement Restriction Cancellation function*, which increases the flexibility of stage movement. The operator can move the stage based on their imaging requirements free of restrictions.

• The Chamber Scope enhances the safety of stage movements*.
  The Chamber Scope is a device for monitoring the inside of the specimen chamber. By using an infrared camera the inside of the specimen chamber can be monitored during SEM image observation. It is also possible to magnify the Chamber Scope image and view the sample position more clearly.

• Integrated in-chamber camera display
  SEM MAP, now in-chamber, offers wide-angle camera navigation* within the graphic user interface. By specifying the observation target position on SEM MAP, the operator can move the stage seamlessly to any position within the observable area and switch from a wide field of view color image to a high-magnification SEM image by freely zooming in and out. Any image can be imported and utilize this capability.

• Easily navigate the entire observable area
  Wide-area SEM MAP images are obtained by stitching numerous images. Navigate to any location of the observable areas, 127 mm dia./200 mm dia. (SU3800/SU3900) with a single click. If necessary, the stage will rotate automatically during navigation.

• Detector-oriented rotation
  The graphic user interface makes it easy to visually grasp the orientation between the sample and the detectors allowing the operator to seamlessly navigate regions of interest, incorporating rotation. During the observation/analysis of samples with topographic irregularities, rotating the stage and scanning direction while looking at SEM MAP alleviates challenges, such as the influence of shadows.

Features a graphical user interface offering easy operation and flexibility by:

• Ability to control stage navigation and observation conditions via mouse
• Using touchscreen and/or control panel
• Large main window at 1280 x 960 pixels
• Simultaneous display for different signal types

• Easily navigate the entire observable area (compared with the Hitachi Model S-3700N)
  After sample setting is complete, various image adjustments (AFS/ABCC/AFC/ASC) are automated, so that sample images can be acquired immediately after starting observation.
  
  Automated Functions:
  AFS = Filament Saturation
  ABCC = Brightness Contrast Correction
  AFC = Focus Correction
  ASC = Stigma Correction
  
  Thanks to the high-speed auto functions based on new design algorithms, the time to execute auto image-adjustment functions is 3X shorter as compared with the previous model. High-quality data acquisition is faster than ever!

• Improved Auto Focus function
  The improved auto-focus algorithm now makes it even easier to quickly acquire high-quality images, especially for planar samples.

• Features of our proprietary Intelligent Filament Technology (IFT):
  • Automatic monitoring and control of filament condition ensures long filament life.
  • Real time monitoring and feedback displays remaining filament life.
  With this function, the operator can use the device with confidence even for long-term continuous observation, such as particle analysis.

The Zigzag function enables automatic acquisition of a continuous field of view. The Multi Zigzag function enables zigzag settings at multiple locations on the sample stage, allowing the acquisition of multiple high-magnification images at user-selectable regions of interest. These images can be montaged to create pixel-dense-micrographs by connecting the acquired images with the Viewer function.

• Report Creator generates reports of acquired data
  Report Creator can export data onto user-customizable templates, not only for SEM images but also for acquired images such as EDS data and CCD camera images. The created reports can be saved and edited in any Microsoft® Office format.

The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.

The newly developed SEM/EDS integration system unifies stage location, condition setting, analysis, reports, and a series of operations from the SEM graphic user interface of the SU3800/SU3900. Controlling everything from the SEM graphic user interface improves throughput and reduces operator tasks.

• CL Observation Using UVD*
  The SU3800/SU3900 feature a high-sensitivity UVD. UVD can acquire images and CL information with secondary electron information by detecting the light generated by collisions of secondary electrons and residual gas molecules accelerated by a bias electrode.

• Segmented BSED allows for visualizing composition and topography

• Easily obtain transmitted images on thin samples
  The newly developed STEM holder can be used to perform transmission images
  with the Hitachi UVD. Images of thin or biological samples can be obtained.

　Hitachi map 3D automatically combines 4 images acquired from different directions using the backscattered electron detector to construct a 3D model. Measurements such as height between two points, volume, and simple surface roughness (area roughness, line roughness, etc.) are possible. Since all backscattered electron data is collected in a single acquisition, it is not necessary to tilt the sample or adjust the field of view.

The SU3800/SU3900 feature IPI, which transfers SEM images to advanced image-processing software (Image-Pro^® manufactured by Media Cybernetics Inc.). The operator can transfer data from SEM images to sophisticated image-analysis software with just one click.

Technical Explanation

Specification

Citations

Applications

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