Nano-probing System
Nanoscale Device Characteristics Analysis System Lineup
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Nanoscale Device Characteristics Analysis System Nano-Prober NP6800
NP6800 is an SEM-based nano probing system optimized for electrical characterization of 10nm device and beyond. Characteristic evaluation using heating and cooling stage and EBAC analysis are also supported.
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Electron Beam Absorbed Current (EBAC) Characterization System nanoEBAC NE4000
NE4000 is an SEM-based probing system developed for electrical characterization of semiconductor devices, materials and electric components as well as for EBAC analysis.