FE-SEM (Field Emission Scanning Electron Microscopes)

SU9000 is the top-of-the-line SEM equipped with cold FE electron source and in-lens objective lens with least aberration, and achieves the world's highest SE resolution of 0.4nm. In addition to high resolution STEM with 0.34nm resolution, EELS and diffraction that are usually considered difficult for SEM can also be supported.

The SU8700 brings in a new era of ultrahigh-resolution Schottky field emission scanning electron microscopes to the long-standing Hitachi EM line-up. This revolutionary FE-SEM platform incorporates multifaceted imaging, high-probe current, automation, efficient workflows for users of all experience levels, and more.

The SU8600 brings in a new era of ultrahigh-resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM line-up. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more.

The SU7000 is designed to allow simultaneous acquisition of multiple secondary and backscattered electron signals, and enables rapid capture of many types of signals. With the ability to display and store up to 6 signal channels simultaneously, the SU7000 offers unsurpassed imaging performance. In addition, it provides a flexible of specimen chamber and vacuum system to support the broad range of observational conditions. Moreover, the electron gun—with its built-in Schottky emitter—can provide irradiating beam currents of up to 200 nA. The SU7000 is built to accommodate the full diversification of future analytical methods.

SU5000 combines Schottky emission electron source and out-lens objective lens for high resolution imaging and diverse analyses of samples with various sizes and compositions. Its drawer type stage allows applications with special stages such as heating, tensile, and so on. Unique user interface, EM Wizard supports best SEM experience of every user.

MirrorCLEM, a simple solution for correlative light and electron microscopy (CLEM).

ACAT automatically adjusts, aligns, and captures a specific region of interest (ROI) across multiple serial sections. Images are automatically acquired by specifying a ROI from a low-magnification SEM image or specifying the intercept position from an optical image/overlay.