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Flat Panel Display Equipment

Introducing the product lineup of flat panel display equipment

Glass Plate Inspection System GI5400

Glass Plate Inspection System GI5400

Glass plate inspection system for contamination control when manufacturing small and medium sized LCD and organic EL panels. Proprietary Hitachi technology allows front surface / back surface separate detection for thin glass plates.

LE4000A Exposure System for Large Size Glass Substrate

LE4000A Exposure System for Large Size Glass Substrate

A high-speed proximity exposure system for volume production of color filter substrate.