Inspection Solution
![Dark Field Wafer Defect Inspection System DI2800](/sg/en/media/semi-di2800_main_png_tcm43-29896.png)
Dark Field Wafer Defect Inspection System DI2800
Contributes to the detection and management of defects that occur on pattern samples during the manufacturing process of G & C devices.
![Dark Field Wafer Defect Inspection System IS Series](/sg/en/media/semi-is_main_tcm43-29904.png)
Dark Field Wafer Defect Inspection System DI4600
Delivering high detection sensitivity and high inspection throughput which enables yield improvement and production cost reduction.
![Wafer Surface Inspection System LS Series](/sg/en/media/semi-ls_main_jpg_tcm43-29906.jpg)
Wafer Surface Inspection System LS Series
Wafer surface inspection system to detect various types of small defects on non-patterned wafer of next generation device.