Inspection Solution
![LS Series](/tw/zhtw/media/semi-ls_main_jpg_tcm44-29906.jpg)
Wafer Surface Inspection System LS Series
Wafer surface inspection system to detect various types of small defects on non-patterned wafer of next generation device.
Wafer surface inspection system to detect various types of small defects on non-patterned wafer of next generation device.