| 1947 |
Established Hinode Shokai Co., Ltd, later Nissei Sangyo, current Hitachi High-Tech Corp. as a Hitachi Group trading company |
| 1970 |
Daini Seikosha, current Seiko Instruments Inc./SII, established an R&D Center and entered into the business of scientific instruments |
| 1973 |
SII established Epolead Service Inc. |
| 2000 |
SII established SII Microscope Inc. |
| 2001 |
Nissei Sangyo changed company name to Hitachi High-Technologies Corp. following the integration of Hitachi's Instruments Group and Semiconductor Manufacturing Equipment Group |
| 2003 |
SII Microscope Inc. changed company name to SII NanoTechnology Inc. SII NanoTechnology succeeded the scientific instruments business of Seiko Instruments by partition of corporation |
| 2004 |
Current Hitachi Instruments (Shanghai) Co., Ltd., was established |
| 2005 |
Current Hitachi High-Tech Science America, Inc., was established |
| 2013 |
SII NanoTechnology became a member of Hitachi High-Technologies Group and officially changed company name to Hitachi High-Tech Science Corporation. Company head office moved to Minato-ku, Tokyo |
|
Hitachi High-Tech Science succeeded Design & Development, QA and Sales section of analytical instruments business from Hitachi High-Technologies |
| 2017 |
Epolead Service Inc. absorbed by Hitachi High-Tech Science Corporation. |
| 2020 |
Hitachi High-Tenologies Corporation changed its name to Hitachi High-Tech Corporation
Oyama Works renamed as Fuji Oyama Works |
