History
1940s
| April 1947 | Established in Chuo-ku, Tokyo, as Hinode Shokai Co., Ltd. with capital of ￥195,000 |
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| October 1947 | Company name changed to Nissei Sangyo |
1960s
| May 1960 | New York branch office opened (now Hitachi High-Tech America, Inc.) |
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| July 1960 | Dusseldorf branch office opened (now Hitachi High-Tech Europe GmbH) |
| September 1962 | The San Paulo liaison office (now Hitachi High-Tech do Brasil Ltda.) is established |
| March 1964 | Hong Kong representative office opened (now Hitachi High-Tech Hong Kong Ltd.) |
| April 1965 | Hitachi Instruments Service Co., Ltd. Established (now Hitachi High-Tech Fielding Corporation) |
1970s
| October 1971 | Company listed on the Second Section of the Tokyo Stock Exchange |
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| March 1972 | Singapore branch office opened (now Hitachi High-Tech (Singapore) Pte. Ltd.) |
| April 1972 | Nissei Oil Sales Co., Ltd. established (now Hitachi High-Tech Nexus Corporation) |
| May 1972 | Nissei Sangyo Brazil established (now Hitachi High-Tech do Brasil Ltda) |
| October 1972 | Company listed on the Second Section of the Osaka Securities Exchange |
| July 1973 | Nissei Electronics Co., Ltd. Established |
| August 1978 | Nissei Sangyo France S.A.R.L. established |
1980s
| April 1980 | Nissei Sangyo Canada, Inc. established (now Hitachi High-Tech Canada, Inc.) |
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| September 1983 | The Company lists on the First Section of the Tokyo Stock Exchange and Osaka Securities Exchange |
| October 1983 | Nissei Software, Inc. (now Hitachi High-Tech Solutions Corporation) is established |
| April 1987 | Nissei Service Inc. established (now Hitachi High-Tech Support Corporation) |
| October 1987 | Nissei Engineering Inc. established |
1990s
| January 1992 | Nissei Sangyo Malaysia Sdn. Bhd. established (now Hitachi High-Tech IPC (Malaysia) Sdn. Bhd.) |
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| January 1994 | Nissei Sangyo Thailand Ltd. established (now Hitachi High-Tech (Thailand) Ltd.) |
| October 1994 | Nissei Sangyo Shanghai Co., Ltd. established (now Hitachi High-Tech (Shanghai) Co., Ltd.) |
| March 1994 | Nissei Sanyo service Pte.Ltd. (now Hitachi High-Tech Instruments service (Asia) PTE. Ltd.) |
2000s
| October 2001 | Company name changed to Hitachi High-Technologies Corporation following the integration of Hitachi's Instruments Group and Semiconductor Manufacturing Equipment Group; Hitachi Science Systems, Ltd., Hitachi Naka Electronics Co., Ltd. and Naka Instruments Co., Ltd. (now Hitachi High-Tech Manufacturing & Service Corporation) made subsidiaries |
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| January 2002 | Nissei Sangyo Trading (Shenzhen) Co., Ltd. established (now Hitachi High-Tech (Shenzhen) Co., Ltd.) |
| March 2002 | Giesecke & Devrient established |
| April 2003 | SANYO High Technology Co., Ltd. (now Hitachi High-Tech Instruments Co., Ltd.) and SANYO High-Tech Service Co., Ltd. (now Hitachi High-Tech Instruments Service Co., Ltd.) made subsidiaries |
| June 2003 | Corporate shift to “committee-based” organizational model. |
| March 2004 | Hitachi Electronics Engineering Co., Ltd. made a subsidiary (Hitachi High-Tech Electronics Engineering Co., Ltd.) |
| April 2004 | Hitachi High-Tech Trading Corporation Established (now Hitachi High-Tech Solutions Corporation) |
| July 2004 | Hitachi High-Tech Manufacturing & Service Corporation Established |
| April 2005 | Nissei Science, Ltd. absorbed by Hitachi High-Technologies Corporation |
| April 2005 | Hitachi High-Technologies Korea Co.,Ltd. Established |
| May 2005 | Hitachi High-Technologies (China) Co., Ltd. Established |
| September 2005 | Hitachi High-Technologies Taiwan Corporation Established |
| April 2006 | Hitachi High-Tech Electronics Engineering Co., Ltd. absorbed by Hitachi High-Technologies Corporation |
| April 2007 | Hitachi High-Tech Science Systems Corporation absorbed by Hitachi High-Technologies Corporation |
| June 2007 | Hitachi High Tech DE Technology name changed to Hitachi High-Tech Engineering Service Corporation (now Hitachi High-Tech Fine Systems Corporation) |
2010s
| April 2010 | Hitachi High-Tech Instruments Co., Ltd.Merged Semiconductor manufacturing equipment business of Renesas Eastern Japan Semiconductor, Inc. |
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| March 2011 | Hitachi High-Technologies (China) Co., Ltd. absorbed by Hitachi High-Technologies (Shanghai) Co., Ltd. |
| October 2011 | PT. Hitachi High-Technologies Indonesia established. |
| April 2012 | Hitachi High-TechTrading Corporation and Hitachi High-Tech Solutions Corporation merge to form new subsidiary Hitachi High-Tech Solutions Corporation |
| January 2013 | SII NanoTechnology Inc. made a subsidiary (now Hitachi High-Tech Science Corporation) |
| April 2013 | Hitachi High-Tech Engineering Service name changed to Hitachi High-Tech Fine Systems Corporation following the integration of Fine Technology Systems Business Group |
| April 2013 | Chorus Call Asia Corporation established |
| April 2013 | Hitachi High-Technologies India Private Limited established |
| October 2013 | Hitachi High-Tech Science Corporation merged design and development, quality assurance and the domestic sales division of Hitachi High-Tech's analytical instruments business. |
| October 2013 | Hitachi High-Tech Control Systems Corporation absorbed by Hitachi High-Tech Science Corporation and Hitachi High-Tech Solutions Corporation, Hitachi High-Tech Fine Systems Corporation |
| January 2014 | Hitachi High-Technologies RUS Limited Liablity Company established |
| April 2014 | Hitachi High-Technologies Mexico S.A. de C.V. established |
| June 2014 | Hitachi High-Tech AW Cryo, Inc established |
| March 2015 | In a joint incorporation-type split with Hitachi High-Tech Instruments Co., Ltd., Fasford Technology Co., Ltd. was established, the back-end semiconductor process businesses of both companies were transferred, and all issued shares of the company were transferred to TY Holdings Co., Ltd. |
| September 2015 | Hitachi High-Tech Instruments Co., Ltd. was absorbed in a merger |
| September 2016 | Hitachi High-Tech Kyushu Corporation Established |
| July 2017 | Materials Analysis Ltd. made a subsidiary (now Hitachi High-Tech Analytical Science Ltd.) |
| May 2018 | Smart Factory & Services Holdings (Thailand) Co., Ltd. established |
| June 2018 | Hitachi High-Tech Amata Smart Services Co., Ltd. established |
| January 2019 | Applied Physics Technologies Inc. made a subsidiary |
2020s
| February 2020 | Hitachi High-Technologies Corporation name changed to Hitachi High-Tech Corporation |
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| February 2020 | Hitachi High-Tech AW Cryo, Inc. liquidated |
| March 2020 | Hitachi High-Tech Materials company name changed to Hitachi High-Tech Nexus |
| April 2020 | H.H.T.A. Semiconductor Equipment Israel, Ltd. company name changed to Hitachi High-Tech Israel, Ltd. |
| May 2020 | Acquired shares of Techcomp Scientific Limited and made it a subsidiary |
| May 2020 | Hitachi High-Tech Corporation was delisted and became a wholly owned subsidiary of Hitachi, Ltd. |
| August 2020 | Acquired shares of VLC Photonics, S.L., making it a subsidiary |
| December 2020 | Techcomp Scientific Limited company name changed to Hitachi High-Tech Scientific Solutions Co., Ltd. |
| December 2020 | Hitachi Instruments (Shanghai) Co., Ltd. liquidated and its business transferred to Hitachi High-Tech Analytical Science Shanghai Co., Limited |
| March 2021 | Techcomp Scientific Ltd. (China) trade name changed to Hitachi High-Tech Scientific Solutions (Beijing) Co., Ltd. |
| April 2022 | Hitachi High-Tech Fine Systems Corporation transferred its railway inspection, HD/FPD and laboratory solutions businesses to Hitachi High-Tech Solutions Corporation, and its manufacturing (manufacturing functions) to Hitachi High-Tech Manufacturing & Service Corporation, and merged with Hitachi High-Tech Corporation as the surviving company and dissolved |
| April 2024 | Hitachi, Ltd.'s healthcare business was transferred to Hitachi High-Tech Corporation through a company split |
| August 2024 | Hitachi High-Tech Corporation makes Nabsys 2.0 LLC a subsidiary |