Search by Industry - MEMS
MEMS
![Sample Preparation](/global/en/media/no_image_tcm27-163222.png)
![Electron Microscopes (SEM/TEM/STEM)](/global/en/media/no_image_tcm27-163222.png)
![Field Instruments/Analyzers](/global/en/media/no_image_tcm27-163222.png)
![Scanning Probe Microscopes (SPM/AFM)](/global/en/media/no_image_tcm27-163222.png)
![Focused Ion Beam Systems (FIB/FIB-SEM)](/global/en/media/no_image_tcm27-163222.png)
PRODUCT
Focused Ion Beam Systems (FIB/FIB-SEM)
Introduction of Focused Ion Beam Systems (FIB/FIB-SEM)
![Processing Machine for MEMS Device](/global/en/media/no_image_tcm27-163222.png)
![Thin Film Equipment](/global/en/media/no_image_tcm27-163222.png)
![Power device Evaluation Equipment](/global/en/media/no_image_tcm27-163222.png)
![Compact ion beam etching machine](/global/en/media/ind_man_ion_001_main_png_tcm27-27713.png)
![Single wafer type ion beam etching machine](/global/en/media/ind_man_ion_002_main_png_tcm27-27720.png)
PRODUCT
Single wafer type ion beam etching machine
Product information of Single wafer type ion beam etching machine.
![Batch type ion beam etching machine](/global/en/media/ind_man_ion_003_main_png_tcm27-27739.png)
PRODUCT
Batch type ion beam etching machine
Product information of Batch type ion beam etching machine.
![Batch Type Wet Station](/global/en/media/batch_main_jpg_tcm27-25634.jpg)
PRODUCT
Batch Type Wet Station
Our system has batch type cleaning ,resist stripping and etching potions. All processes from chemical cleaning to dryer are fully automated.
![Spin Processor (MSP-1)](/global/en/media/msp-1_main_jpg_tcm27-25643.jpg)
PRODUCT
Spin Processor (MSP-1)
This spin processor is suitable for R&D and small production. All processes from chemical process to dryer are in one cup.
![Multi Spin Processor (MSP-2)](/global/en/media/msp-2_main_jpg_tcm27-25651.jpg)
PRODUCT
Multi Spin Processor (MSP-2)
Multi spin processor is suitable for mass production and Multi complex process.
![Spectrophotometers (UV-Vis/NIR, FL)](/global/en/media/no_image_tcm27-163222.png)
![CD-SEM & Defect Inspection](/global/en/media/no_image_tcm27-163222.png)