LE4000A Exposure System for Large Size Glass Substrate
A high speed proximity exposure system for volume production of color filter substrate.
System achieves high throughput and high reliability.
Features
-
High throughput
18sec./plate(except exposure time) - High resolution
- Automatic alignment and proximity gap control
- Non contact pre-alignment
-
Substrate size
Max.400mm x 500mm - Applicable to inline
Related Links
Related Information
