Glass Plate Inspection System GI5400
Glass plate inspection system for contamination control when manufacturing small and medium sized LCD and organic EL panels.
Proprietary Hitachi technology allows front surface / back surface separate detection for thin glass plates.
High reliability delivers high detection sensitivity, high-speed inspection and high-magnification observation of contaminants. Ideal for controlling contamination in panel manufacturing processes.
Features
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Supports sheet glass
Glass thickness: 0.3 mm - 0.7 mm; max. glass plate size: 1300 mm × 1500 mm -
Accurate front and back surface separate detection
Front/back separation factor: 150 (front surface: φ0.3 µm; rear surface: φ50.0 µm; bare glass thickness: 0.7 mm) -
High detection sensitivity
Surface contaminants φ0.3 µm -
High speed inspection
1300 mm × 1500 mm in 90 seconds (2-head optical system, φ1.0 µm high-speed mode) - Contaminants can be viewed on a monitor at high magnification
