Data Station for CD-SEM
Features
For CD-SEMs, recipe creation and data management are also important requirements in addition to CD-measurements. However, it is not efficient for CD-SEMs to be used for recipe creation and data management. CD-SEMs should be used exclusively for CD-measurements. Data Station enables recipe creation and data management. Operation of the Data Station is as simple as using the CD-SEM.
Main function
- Remote recipe management
- Monitoring of machine operating status
- Automatic data collection of measurement result
- Recipe synchronization
Applicable model
- S-9380Ⅱ(software version : V23 or higher, equipped with FA-PC) CG series (CG4000/5000)
- CG series (CG4000/5000)
Note:
We recommend that the software version on Data Station and CD-SEMs should be unified to same version.
In case that the software version on Data Station and CD-SEM are not compatible, there are risks of destroying the recipe.
