参考文献・発表リスト
2019年
- Focused ion beam system equipped with gas field ion source for industrial application
Anto Yasaka, F. Aramaki, T. Kozakai, O. Matsuda, K. Shiina and Y. Kawanami
The 22nd International Conference on Secondary Ion Mass Spectrometry (SIMS-22), Kyoto, Japan, 2019, 25-3-I1
2017年
- Mask Repair Technology Using Gas Field Ion Source
- Mask Repair Technology using Gas Field Ion Source
Anto Yasaka, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda, Kensuke Shiina, Koji Nagahara
2017 MRS Fall Meeting & Exhibit, Boston, Massachusetts, TC03.11.01
Anto Yasaka, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda
第64回春季応用物理学会学術講演会講演予稿集,E16p-315-3 (2017)
2016年
- Mask Repair Technology using Gas Field Ion Source
- Nanoscale Imaging and Fabricatin by Focused Ion Beam System Equipped with Gas Field Ion SourceNanoscale Imaging and Fabrication by Focused Ion Beam System Equipped with Gas Field Ion Source
- Nanoscale Imaging, Material Removal and Deposition for Fabrication of Cutting-edge Semiconductor Devices
- ナノレベルの「見る」,「削る」,「付ける」技術で 最先端半導体デバイス製造に貢献する -イオンビームによるフォトマスク欠陥修正技術-
A. Yasaka, F. Aramaki, T. Kozakai, O. Matsuda
AVS 63rd International Symposium & Exhibition HI+MI+NS-ThA-1
T. Kozakai, O. Matsuda
The 29th International Microprocesses and Nanotechnology Conference (MNC2016), Kyoto, Japan, 9C-2-1
Anto Yasaka, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda
Hitachi Review, Vol.65 No.7
八坂行人、荒巻文朗、小堺智一、松田修
日立評論2016年5月号
2015年
- Photomask repair technology by using gas field ion source
A. Yasaka, F. Aramaki, T. Kozakai, O. Matsuda, K. Shiina, H. Oba, Y. Sugiyama, K. Aita, and M. Muramatsu
Gas Ion Microscopy Workshop 2015, Trinity College, Dublin, Ireland
2014年
- Performance of GFIS mask repair system for various mask materials
Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda, Anto Yasaka, Hitachi High-Tech Science Corporation, 36-1 Takenoshita, Oyama-cho, Sunto-gun,Shizuoka 410-1393, Japan
Shingo Yoshikawa, Koichi Kanno, Hiroyuki Miyashita, Naoya Hayashi, Dai Nippon Printing Co., Ltd., 2-2-1 Fukuoka, Fujimino-shi, Saitama 356-8507, Japan, Performance of GFIS mask repair system for various mask materials, Proc. SPIE 9235, Photomask Technology 2014, 92350F (October 21, 2014),
2012年
- Photomask Repair Technology by using Gas Field Ion Source
- Repair Technology for Large Scale Photomasks
F.Aramaki, T.Kozakai, O.Matsuda, O.Takaoka, Y.Sugiyama, H.Oba, K.Aita, A.Yasaka, Photomask Repair Technology by using Gas Field Ion Source, Photomask Japan 2012
F.Aramaki, T.Kozakai, Y.Nakagawa, Y.Koyama, M.Aso, H.Momota, H.Takiguchi, M.Okabe, M.Muramatsu, Repair Technology for Large Scale Photomasks, Photomask Japan 2012
2011年
- EUVLマスク修正のための新しいFIB技術の開発
- Development of new FIB technology for EUVL mask repair
荒巻文朗、松田修、小堺智一、大庭弘、杉山安彦、八坂行人、天野剛、茂村弘之、須賀治, EUVLマスク修正のための新しいFIB技術の開発, NGLワークショップ2011
F.Aramaki, T.Ogawa, O.Matsuda, T.Kozakai, Y.Sugiyama, H.Oba, A.Yasaka, T.Amano, H.Shigemura, O.Suga, Development of new FIB technology for EUVL mask repair, SPIE Advanced Lithography 2011
2010年
- Nanotweezers for removing nanoparticles on EUVL masks
- Reflective multi-layer etching for repairing clear defect on EUV masks using FIB
- Study of EUV mask defect repair using FIB method
- FIB-CVD technology for EUV mask repair
F.Aramaki, T.Umemoto, M.Yasutake, H.Shigemura, O.Suga, Nanotweezers for removing nanoparticles on EUVL masks, International Symposium on Extreme Ultraviolet Lithography
T.Amano, H.Shigemura, N.Takagi, T.Terasawa, O.Suga, T.Kozakai, F.Aramaki, A.Yasaka, Y. Inazuki, N.Hayashi, Reflective multi-layer etching for repairing clear defect on EUV masks using FIB, International Symposium on Extreme Ultraviolet Lithography
T.Amano, N.Takagi, H.Shigemura, T.Terasawa, O.Suga, K.Shiina, F.Aramaki, A.Yasaka, Y. Inazuki, N.Hayashi, Study of EUV mask defect repair using FIB method, Photomask Technology 2010
Tsuyoshi Amano, Noriaki Takagi, Hiroyuki Shigemura, Tsuneo Terasawa, Osamu Suga, Kensuke Shiina, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda, Anto Yasaka, FIB-CVD technology for EUV mask repair, Photomask Japan 2010
2009年
- Nanotweezers as a particle removal tool for EUVL masks
- FIB mask repair technology for EUV mask
- ナノピンセット:EUVLへの応用
- Removal Method of Nano-Cut Debris for Photomask Repair Using an Atomic Force Microscopy System
Takeshi Umemoto, Masatoshi Yasutake, Fumio Aramaki, Hiroyuki Shigemura, Osamu Suga, Nanotweezers as a particle removal tool for EUVL masks, Photomask Japan 2009
Tsuyoshi Amano, Yasushi Nishiyama, Hiroyuki Shigemura, Tsuneo Terasawa, Osamu Suga, Kensuke Shiina, Fumio Aramaki, Anto Yasaka, Tsukasa Abe, Hiroshi Mohri, FIB mask repair technology for EUV mask, Photomask Japan 2009
梅基 毅、安武 正敏、荒巻 文朗、"ナノピンセット:EUVLへの応用", クリーンテクノロジー(日本工業出版), 12月号(2009)
Futoshi Iwata, Kazutaka Saigo, Toshihiko Asao, Masatoshi Yasutake, Osamu Takaoka, Takuya Nakaue, Shuichi Kikuchi, "Removal Method of Nano-Cut Debris for Photomask Repair Using an Atomic Force Microscopy System", Japanese Journal of Applied Physics 48 (2009)
2008年
- Ga implantation and interlayer mixing during FIB repair of EUV mask defects
- Study of EUVL mask defect repair using FIB-GAE method
- EUVLマスク欠陥のFIB-GAE修正プロセス開発
- Damage analysis of EUV mask under Ga focused ion beam irradiation
- Evaluation of defect repair of EUVL mask pattern using FIB-GAE method
- 自己検知型カンチレバーを用いた液中AFM観察法\
- Advanced Photomask Defect Repairing Technology Using FIB and SPM
- 45nmノード対応フォトマスク欠陥修正装置
Yasushi Nishiyama; Tsuyoshi Amano; Hiroyuki Shigemura; Tsuneo Terasawa; Osamu Suga; Tomokazu Kozakai; Fumio Aramaki; Kensuke Shiina; Anto Yasaka; Ryoji Hagiwara, Ga implantation and interlayer mixing during FIB repair of EUV mask defects, Photomask Technology 2008
Tsuyoshi Amano; Yasushi Nishiyama; Hiroyuki Shigemura; Tsuneo Terasawa; Osamu Suga; Kensuke Shiina; Fumio Aramaki; Ryoji Hagiwara; Anto Yasaka, Study of EUVL mask defect repair using FIB-GAE method, Photomask Technology 2008
天野剛、西山泰史、茂村弘之、寺澤恒男、須賀治、椎名健介、荒巻文朗、八坂行人, EUVLマスク欠陥のFIB-GAE修正プロセス開発, NGLワークショップ2008
Yasushi Nishiyama; Tsuyoshi Amano; Hiroyuki Shigemura; Tsuneo Terasawa; Osamu Suga; Tomokazu Kozakai; Syuichi Kikuchi; Kensuke Shiina; Anto Yasaka; Ryoji Hagiwara, Damage analysis of EUV mask under Ga focused ion beam irradiation, Photomask Japan 2008
Tsuyoshi Amano; Yasushi Nishiyama; Hiroyuki Shigemura; Tsuneo Terasawa; Osamu Suga; Ryoji Hagiwara; Kensuke Shiina; Shuichi Kikuchi; Anto Yasaka, Evaluation of defect repair of EUVL mask pattern using FIB-GAE method, Photomask Japan 2008
西郷和隆, 石川恒志, 中上卓哉, 高岡修, 安武正敏, 菊池修一, 牛木辰男, 岩田 太, 自己検知型カンチレバーを用いた液中AFM観察法, 春季第55回応用物理学関係連合講演会
O. Takaoka, “Advanced Photomask Defect Repairing Technology Using FIB and SPM”, Int. J. of Automation Technology, Vol.2, pp66-69(2008)
萩原良二, 高岡修 "45nmノード対応フォトマスク欠陥修正装置", 電子材料(工業調査会),3月号(2008)
2007年
- 高精度微細加工用AFMカンチレバーの開発
- ナノ加工粉除去装置の開発とAFMナノ振動切削プロセスにおける効果
- AFMナノスケール振動切削を用いたフォトマスクリペア技術の開発
- A semi-automated AFM photomask repair process for manufacturing application using SPR6300
- A semi-automated AFM photomask repair process for manufacturing application using SPR6300
中上卓哉, 高岡修, 浜尾尚範, 渡邉将史, 安武正敏, 渡邉直哉, 白川部喜春,八坂行人, 高精度微細加工用AFMカンチレバーの開発, 秋季第68回応用物理学会学術講演会
西郷和隆,浅尾 俊彦, 岩田 太, 佐々木 彰, 中上 卓哉, 安武 正敏, 高岡 修, 菊池 修一, ナノ加工粉除去装置の開発とAFMナノ振動切削プロセスにおける効果, 精密工学会秋季大会学術講演会
浅尾 俊彦, 瀬田 翔平, 岩田 太, 佐々木 彰, 中上 卓哉, 安武 正敏, 高岡 修, 菊池 修一, AFMナノスケール振動切削を用いたフォトマスクリペア技術の開発, 精密工学会春季大会学術講演会
M. Dellagiovanna, H. Miyashita, H. Yoshioka, S. Murai, T. Nakaue, O. Takaoka, S. Kikuchi, R. Hagiwara, and S. Benard, A semi-automated AFM photomask repair process for manufacturing application using SPR6300, Photomask Technology 2007
M. Dellagiovanna, H. Miyashita, H. Yoshioka, S. Murai, T. Nakaue, O. Takaoka, S. Kikuchi, R. Hagiwara, and S. Benard, “A semi-automated AFM photomask repair process for manufacturing application using SPR6300”, Proc. of SPIE Vol.6730, pp673021-1- pp673021-11(2007)
2006年
- FIBとSPMを用いたフォトマスク欠陥修正技術
- Advanced Photomask Repair Technology for 65nm Lithography (6)
- Advanced Photomask Repair Technology for 65nm Lithography (5)
- Advanced Photomask Repair Technology for 65nm Lithography (5)
- Advanced Photomask Repair Technology for 65nm Lithography (6)
- FIBとSPMを用いたフォトマスク欠陥修正技術
高岡修, FIBとSPMを用いたフォトマスク欠陥修正技術, 精密工学会超精密位置決め専門委員会定例会
F. Aramaki, T. Kozakai, M. Muramatsu, Y. Sugiyama, Y. Koyama, O. Matsuda, K. Suzuki, M. Okabe, T. Doi, R. Hagiwara, T. Adachi, A. Yasaka, Y. Tanaka, O. Suga, N. Nishida, and Y. Usui, Advanced Photomask Repair Technology for 65nm Lithography (6), Photomask Technology 2006
F. Aramaki, T. Kozakai, M. Muramatsu, Y. Sugiyama, Y. Koyama, O. Matsuda, K. Suzuki, M. Okabe, T. Doi, R. Hagiwara, T. Adachi, A. Yasaka, Y. Tanaka, O. Suga, N. Nishida, and Y. Usui, Advanced Photomask Repair Technology for 65nm Lithography (5), Photomask Japan 2006
F. Aramaki, T. Kozakai, M. Muramatsu, Y. Sugiyama, Y. Koyama, O. Matsuda, K. Suzuki, M. Okabe, T. Doi, R. Hagiwara, T. Adachi, A. Yasaka, Y. Tanaka, O. Suga, N. Nishida, and Y. Usui, “Advanced Photomask Repair Technology for 65nm Lithography (5)”, Proc. of SPIE, Vol.6283, pp628310-1-628310-8(2006)
F. Aramaki, T. Kozakai, M. Muramatsu, Y. Sugiyama, Y. Koyama, O. Matsuda, K. Suzuki, M. Okabe, T. Doi, R. Hagiwara, T. Adachi, A. Yasaka, Y. Tanaka, O. Suga, N. Nishida, and Y. Usui, “Advanced Photomask Repair Technology for 65nm Lithography (6)”, Proc. of SPIE, Vol.6349, pp63491E-1-63491E-7(2006)
高岡修, “FIBとSPMを用いたフォトマスク欠陥修正技術”, 超精密位置決め専門委員会定例会講演前刷集, No.2006-2, pp11-18(2006)
2005年
- Advanced Photomask Repair Technology for 65nm Lithography (4)
- Advanced Photomask Repair Technology for 65nm Lithography (3)
- Advanced Photomask Repair Technology for 65nm Lithography (3)
- Advanced Photomask Repair Technology for 65nm Lithography (4)
Y. Itou, Y. Tanaka, O. Suga, Y. Sugiyama, R. Hagiwara, H. Takahashi, O. Takaoka, T. Kozakai, O. Matsuda, K. Suzuki, M. Okabe, S. Kikuchi, A. Uemoto, A. Yasaka, T. Adachi, and N. Nishida, Advanced Photomask Repair Technology for 65nm Lithography (4), 25th Annual BACUS Symposium
Y. Itou, Y. Tanaka, O. Suga, Y. Sugiyama, R. Hagiwara, H. Takahashi, O. Takaoka, T. Kozakai, O. Matsuda, K. Suzuki, M. Okabe, S. Kikuchi, A. Uemoto, A. Yasaka, T. Adachi, and N. Nishida, Advanced Photomask Repair Technology for 65nm Lithography (3), Photomask Japan 2005
Y. Itou, Y. Tanaka, O. Suga, Y. Sugiyama, R. Hagiwara, H. Takahashi, O. Takaoka, T. Kozakai, O. Matsuda, K. Suzuki, M. Okabe, S. Kikuchi, A. Uemoto, A. Yasaka, T. Adachi, and N. Nishida, “Advanced Photomask Repair Technology for 65nm Lithography (3)”, Proc. of SPIE, Vol.5853, pp1000-1008(2005)
Y. Itou, Y. Tanaka, O. Suga, Y. Sugiyama, R. Hagiwara, H. Takahashi, O. Takaoka, T. Kozakai, O. Matsuda, K. Suzuki, M. Okabe, S. Kikuchi, A. Uemoto, A. Yasaka, T. Adachi, and N. Nishida, “Advanced Photomask Repair Technology for 65nm Lithography (4)”, Proc. of SPIE, Vol.5992, pp59924Y-1-59924Y-8(2005)
2004年
- FIB Mask Repair Technology for Electron Projection Lithography
- Advanced Photomask Repair Technology for 65nm Lithography (2)
- Advanced Photomask Repair Technology for 65nm Lithography (1)
- Advanced Photomask Repair Technology for 65nm Lithography (1)
- Advanced Photomask Repair Technology for 65nm Lithography (2)
- FIB Mask Repair Technology for Electron Projection Lithography
Y. Yamamoto, M. Hasuda, H. Suzuki, M. Sato, O. Takaoka, H. Matsumura, N. Matsumoto, K. Iwasaki, R. Hagiwara, K. Suzuki, Y. Ikku, K. Aita, T.Kaito, T. Adachi, A. Yasaka, FIB Mask Repair Technology for Electron Projection Lithography, Photomask Japan 2004
Y. Itou, Y. Tanaka, N. Yoshioka, Y. Sugiyama, R. Hagiwara, H. Takahashi, O. Takaoka, T. Kozakai, O. Matsuda, K. Suzuki, M. Okabe, S. Kikuchi, A. Uemoto, A. Yasaka, T. Adachi, N. Nishida, and T. Ozawa, Advanced Photomask Repair Technology for 65nm Lithography (2), 24th Annual BACUS Symposium
Y. Itou, Y. Tanaka, N. Yoshioka, Y. Sugiyama, R. Hagiwara, H. Takahashi, O. Takaoka, J. Tashiro, K. Suzuki, M. Okabe, S. Kikuchi, A. Uemoto, A. Yasaka, T. Adachi, N. Nishida, and T. Ozawa, Advanced Photomask Repair Technology for 65nm Lithography (1), Photomask Japan 2004
Y. Itou, Y. Tanaka, N. Yoshioka, Y. Sugiyama, R. Hagiwara, H. Takahashi, O. Takaoka, J. Tashiro, K. Suzuki, M. Okabe, S. Kikuchi, A. Uemoto, A. Yasaka, T. Adachi, N. Nishida, and T. Ozawa, “Advanced Photomask Repair Technology for 65nm Lithography (1)”, Proc. of SPIE, Vol.5446, pp301-312(2004)
Y. Itou, Y. Tanaka, N. Yoshioka, Y. Sugiyama, R. Hagiwara, H. Takahashi, O. Takaoka, T. Kozakai, O. Matsuda, K. Suzuki, M. Okabe, S. Kikuchi, A. Uemoto, A. Yasaka, T. Adachi, N. Nishida, and T. Ozawa, “Advanced Photomask Repair Technology for 65nm Lithography (2)”, Proc. of SPIE, Vol.5567, pp1132-1143(2004)
Y. Yamamoto, M. Hasuda, H. Suzuki, M. Sato, O. Takaoka, H. Matsumura, N. Matsumoto, K. Iwasaki, R. Hagiwara, K. Suzuki, Y. Ikku, K. Aita, T.Kaito, T. Adachi, A. Yasaka, “FIB Mask Repair Technology for Electron Projection Lithography”, Proc. of SPIE, Vol.5446, pp348-356(2004)
2003年
- Advanced Photomask Repair Technology for 90nm/ArF Lithography (3)
- Advanced Photomask Repair Technology for 100nm/ArF Lithography (2)
- 集束イオンビームによるマスク修正技術
- Advanced Photomask Repair Technology for 100nm/ArF Lithography (2)
- Advanced Photomask Repair Technology for 90nm/ArF Lithography (3)
- 集束イオンビームによるマスク修正技術
Y. Tanaka, Y. Itou, N. Yoshioka, R. Hagiwara, A.Yasaka, O. Takaoka, T. Kozakai, Y. Koyama, H. Sawaragi, Y. Sugiyama, M. Muramatsu, T. Doi, K. Suzuki, M.Okabe, M. Shinohara, O. Matsuda, K. Aita, T. Adachi, Y. Morikawa, M. Nishiguchi, Y. Satoh, and N. Hayashi, Advanced Photomask Repair Technology for 90nm/ArF Lithography (3), 23rd Annual BACUS Symposium
R. Hagiwara, A. Yasaka, K. Aita, O. Takaoka, Y. Koyama, T. Kozakai, T. Doi, M. Muramatsu, K. Suzuki, Y. Sugiyama, O. Matsuda, M. Okabe, S. Shinohara, M. Hasuda, T. Adachi, Y. Morikawa, M. Nishiguchi, Y. Satoh, N. Hayashi, T. Ozawa, Y. Tanaka, and N. Yoshioka, Advanced Photomask Repair Technology for 100nm/ArF Lithography (2), Photomask Japan 2003
八坂行人, 萩原良二, 高岡修, 小山喜弘, 中川良知, 荒巻文朗, 小堺智一, 松田修, 相田和男, 土井利夫, 村松正司, 鈴木勝美, 山本洋, 鈴木浩之, 篠原正至, 荷田昌克, 集束イオンビームによるマスク修正技術, NGL2003次世代リソグラフィワークショップ
R. Hagiwara, A. Yasaka, K. Aita, O. Takaoka, Y. Koyama, T. Kozakai, T. Doi, M. Muramatsu, K. Suzuki, Y. Sugiyama, O. Matsuda, M. Okabe, S. Shinohara, M. Hasuda, T. Adachi, Y. Morikawa, M. Nishiguchi, Y. Satoh, N. Hayashi, T. Ozawa, Y. Tanaka, and N. Yoshioka, “Advanced Photomask Repair Technology for 100nm/ArF Lithography (2)”, Proc. of SPIE, Vol.5130, pp510-519(2003)
Y. Tanaka, Y. Itou, N. Yoshioka, R. Hagiwara, A.Yasaka, O. Takaoka, T. Kozakai, Y. Koyama, H. Sawaragi, Y. Sugiyama, M. Muramatsu, T. Doi, K. Suzuki, M.Okabe, M. Shinohara, O. Matsuda, K. Aita, T. Adachi, Y. Morikawa, M. Nishiguchi, Y. Satoh, and N. Hayashi, “Advanced Photomask Repair Technology for 90nm/ArF Lithography (3)”, Proc. of SPIE, Vol.5256, pp526-537(2003)
八坂行人, 萩原良二, 高岡修, 小山喜弘, 中川良知, 荒巻文朗, 小堺智一, 松田修, 相田和男, 土井利夫, 村松正司, 鈴木勝美, 山本洋, 鈴木浩之, 篠原正至, 荷田昌克, “集束イオンビームによるマスク修正技術”, NGL2003次世代リソグラフィワークショップ予稿集, pp126-128(2003)
2002年
- Advanced Photomask Repair Technology for 100nm/ArF Lithography
- Advanced Photomask Repair Technology for 100nm/ArF Lithography
R. Hagiwara, A. Yasaka, K. Aita, O. Takaoka, Y. Koyama, T. Kozakai, T. Doi, M. Muramatsu, K. Suzuki, Y. Sugiyama, H. Sawaragi, M. Okabe, S. Shinohara, M. Hasuda, T. Adachi, Y. Morikawa, M. Nishiguchi, Y. Satoh, N. Hayashi, T. Ozawa, Y. Tanaka, and N. Yoshioka, Advanced Photomask Repair Technology for 100nm/ArF Lithography, 22nd Annual BACUS Symposium
R. Hagiwara, A. Yasaka, K. Aita, O. Takaoka, Y. Koyama, T. Kozakai, T. Doi, M. Muramatsu, K. Suzuki, Y. Sugiyama, H. Sawaragi, M. Okabe, S. Shinohara, M. Hasuda, T. Adachi, Y. Morikawa, M. Nishiguchi, Y. Satoh, N. Hayashi, T. Ozawa, Y. Tanaka, and N. Yoshioka, “Advanced Photomask Repair Technology for 100nm/ArF Lithography ”, Proc. of SPIE, Vol.4889, pp1056-1064(2002)
2001年
- Advanced FIB mask repair technology in ArF lithography 3
- Advanced Photomask Repair Technology for ArF Lithography (2)
- Advanced Photomask Repair Technology for ArF Lithography (3)
R.Hagiwara, A.Yasaka, O.Takaoka, T.Kozakai, S.Yabe, Y.Koyama, M.Muramatsu, T.Doi, K.Suzuki, M.Okabe, K.Aita, T.Adachi, s.Kubo, N.Yoshioka, H.Morimoto, Y.Morikawa, K.Iwase, N.Hayashi, Advanced FIB mask repair technology in ArF lithography 3, Photomask Japan 2001
S. Kubo, K. Hiruta, H. Morimoto, A. Yasaka, R. Hagiwara, T. Adachi, Y. Morikawa, K. Iwase and N. Hayashi, “Advanced Photomask Repair Technology for ArF Lithography (2)”, Proc. of SPIE, Vol.4186, pp158-164(2001)
R. Hagiwara, A. Yasaka, O. Takaoka, T. Kozakai, S. Yabe, Y. Koyama, M. Muramatsu, T. Doi, K. Suzuki, M . Okabe, K. Aita, T. Adachi, S. Kubo, N. Yoshioka, H. Morimoto, Y. Morikawa, K. Iwase, and N. Hayashi, “Advanced Photomask Repair Technology for ArF Lithography (3)”, Proc. of SPIE, Vol.4409, pp555-562(2001)
2000年
- Advanced FIB mask repair technology in ArF lithography 2
- Advanced FIB mask repair technology in ArF lithography
- Advanced Photomask Repair Technology for ArF Lithography
S.Kubo, K.Hiruta, H.Morimoto, A.Yasaka, R.Hagiwara, T.Adachi, Y.Morikawa, K.Iwase, N.Hayashi, Advanced FIB mask repair technology in ArF lithography 2, 20th BACUS symposium
K.Hiruta, S.Kubo, H.Morimoto, A.Yasaka, R.Hagiwara, T.Adachi, Y.Morikawa, K.Iwase, N.Hayashi, Advanced FIB mask repair technology in ArF lithography, Photomask Japan 2000
K. Hiruta, S. Kubo, H. Morimoto, A. Yasaka, R. Hagiwara, T. Adachi, Y. Morikawa, K. Iwase and N. Hayashi, “Advanced Photomask Repair Technology for ArF Lithography”, Proc. of SPIE, Vol.4066, pp522-530(2000)
1999年
- FIB mask repair technology
- Development of focused ion-beam repair for opaque defects on MoSi-based attenuated phase-shift mask
- Development of focused-ion beam repair for opaque defects on MoSi-based attenuated phase-shift mask
- FIB mask repair technology
A.Yasaka, FIB mask repair technology, SEMI Technology Symposium '99
Nishida, Naoki; Nishio, Yasuyuki; Kinoshita, Hiroshi; Takaoka, Osamu; Kozakai, Tomokazu; Aita, Kazuo, Development of focused ion-beam repair for opaque defects on MoSi-based attenuated phase-shift mask, Photomask Japan 99
N. Nishida, Y. Nishio, H. Kinoshita, O. Takaoka, T. Kozakai, and K. Aita, “Development of focused-ion beam repair for opaque defects on MoSi-based attenuated phase-shift mask”, Proc. of SPIE, Vol.3748, pp599-608(1999)
A. yasaka, “FIB mask repair technology”, SEMI Technology Symposium '99, pp3-70 (1999)
1998年
- FIB mask repair for MoSi-based PSMs
T.Adachi, O.Takaoka, K.Aita, A.Yasaka, FIB mask repair for MoSi-based PSMs, High-throughput Charged-particle lithography workshop, 98
1997年
- Recent topics in FIB mask repair
- Repair system for future mask fabrication
- Advanced photomask reconstruction with the Seiko SIR 3000
- 『集束イオンビーム装置』
A. Yasaka, Recent topics in FIB mask repair, High-throughput Charged-particle lithography workshop, 97
A. Yasaka, Repair system for future mask fabrication, 3rd symposium on 193nm lithography
S. Ruatta, E. Smith, A. Yasaka, Advanced photomask reconstruction with the Seiko SIR 3000, 17th BACUS symposium
岩崎、杉山、小山、八坂、足立、『集束イオンビーム装置』、1998年版電子材料別冊超LSI製造試験装置ガイドブック p.197(1997)
1996年
- Recent progress in repair accuracy of the focused ion-beam mask repair system
- Performance of gas-assisted FIB repair for opaque defects
Aita, Kazuo; Yasaka, Anto; Kitamura, Tadashi; Matsumura, Hiroshi; Satoh, Yasushi, Nakamura, Hiroshi, Fujikawa, Junji; Tsuchiya, Katsuhide, Noguchi, Shigeru, Recent progress in repair accuracy of the focused ion-beam mask repair system, Photomask Japan 96
Yasushi Satoh, Hiroshi Nakamura,Junji Fujikawa, Katsuhide Tsuchiya, Shigeru Noguchi, Kazuo Aita, Anto Yasaka, Performance of gas-assisted FIB repair for opaque defects, 16th BACUS symposium
1995年
- New technique for repairing opaque defects
Aita, Kazuo; Koyama, Yoshihiro; Matsumura, Hiroshi; Kaito, Takashi; Satoh, Yasushi; Tsuchiya, Katsuhide; Noguchi, Shigeru, New technique for repairing opaque defects, Photomask Japan 95
1991年
- 『集束イオンビーム装置』
八坂、皆藤、足立、『集束イオンビーム装置』、1992年版電子材料別冊超LSI製造試験装置ガイドブック p.87(1991)
1990年
- Experimental study on the influence of liquid metal ion source energy distribution on focused ion beam induced deposition
- Ga液体金属イオン源のエネルギー分布のヒーターパワー依存性
A.Yasaka, T.Yamaoka, T.Kaito, T.Adachi, Experimental study on the influence of liquid metal ion source energy distribution on focused ion beam induced deposition, Second Japan-US Seminar on Focused ion Beams and Applications
山岡、八坂, Ga液体金属イオン源のエネルギー分布のヒーターパワー依存性, 90年秋季応用物理学会学術講演会
1987年
- Recent progress on etching technology with focused ion beam in photomask repair
Y.Nakagawa, S.Sasaki, M.Sato, J.Glanville, M.Yamamoto, Recent progress on etching technology with focused ion beam in photomask repair, Japan-US Seminar on Focused Ion Beam Technology and Applications
1986年
- Submicron mask repair using focused ion beam technology
- Submicron mask repair using focused ion beam technology
- 『SIR-1000フォトマスクリペア装置』
M.Yamamoto, M.Sato, H.kyogoku, K.Aita, Y.Nakagawa, A.Yasaka, R.Takasawa, O.Hattori, Submicron mask repair using focused ion beam technology, SPIE, Electron-Beam, X-ray, & Ion-Beam Techniques for submicronmeter lithographies V
M.Yamamoto, M.Sato, H.kyogoku, K.Aita, Y.Nakagawa, A.Yasaka, R.Takasawa, O.Hattori, Submicron mask repair using focused ion beam technology, 17th理研シンポジウム Ion implantation and Submicron Fabrication
山本、『SIR-1000フォトマスクリペア装置』、月刊Semiconductor World 1月号 p.97(1986)
1985年
- Mask repair using focused ion beam
- Mask repair using focused ion beam
- 『集束イオンビーム装置』
Takashi Kaito and Masahiro Yamamoto, Mask repair using focused ion beam, 9th Symposium on Ion Source and Ion-Assisted Technology(ISIAT 85)
Takashi Kaito and Masahiro Yamamoto, Mask repair using focused ion beam, 9th Symposium on Ion Source and Ion-Assisted Technology(ISIAT 85)
相田、佐藤、山本、『集束イオンビーム装置』、1986年版電子材料別冊LSI製造試験装置ガイドブック p.115(1985)
1984年
- 集束イオンビームCVDによるカーボン膜パターンの形成
皆藤、中川、佐藤、山本, 集束イオンビームCVDによるカーボン膜パターンの形成, 84年第45回秋期応用物理学会学術講演会