Defect Review SEM CR7300 Series
Inline Review SEM which contributes yield enhancement with high speed ADR and accurate ADC
Feature
- Enhanced SEM image resolution for cutting-edge device development and mass production
- New in-situ solution of yield control which is quantified and indicating an Electrical Properties (R / C) in semiconductor process
- Enhanced productivity which improved throughput performance by 2x compared to the previous model
- Contribute to the N3-Generation device development by advanced defect review and analysis function for unpatterned wafers
- Improved defect classification performance and accuracy remarkably by adopting AI based ADC(Automatic Defect Classification)
