Advanced High Voltage CD-SEM “CV6300 Series”
- CV6300 Series enables measurements of high aspect ratio deep holes and trench bottom dimensions to control the manufacturing of beyond 96 layers 3D NAND flash memory.
- CV6300 Series enables high speed and high precision overlay measurements for the advanced DRAM and Logic device.
Features
- CV6300 Series is the advanced in-line measurement system that realized a 45kV acceleration voltage
- Measurement throughput has been improved by about 25% compared to the previous mode
- The precision improvement in dimensions and overlay measurements has been achieved, as well as a reduction of measurement variation among systems
