CD-SEM & Defect Inspection
![Used Equipment (Metrology & Inspection)](/tw/zhtw/media/main_tcm44-26641.png)
![Data Station for CD-SEM](/tw/zhtw/media/main_jpg_tcm44-26623.jpg)
![Terminal PC Software](/tw/zhtw/media/main_jpg_tcm44-26617.jpg)
![LS Series](/tw/zhtw/media/semi-ls_main_jpg_tcm44-29906.jpg)
Wafer Surface Inspection System LS Series
Wafer surface inspection system to detect various types of small defects on non-patterned wafer of next generation device.
Wafer surface inspection system to detect various types of small defects on non-patterned wafer of next generation device.