Data Station for CD-SEM

Features

For CD-SEMs, recipe creation and data management are also important requirements in addition to CD-measurements. However, it is not efficient for CD-SEMs to be used for recipe creation and data management. CD-SEMs should be used exclusively for CD-measurements. Data Station enables recipe creation and data management. Operation of the Data Station is as simple as using the CD-SEM.

Main function

• Remote recipe management
• Monitoring of machine operating status
• Automatic data collection of measurement result
• Recipe synchronization

Applicable model

• S-9380Ⅱ(software version : V23 or higher, equipped with FA-PC) CG series (CG4000/5000)
• CG series (CG4000/5000)

We recommend that the software version on Data Station and CD-SEMs should be unified to same version.
In case that the software version on Data Station and CD-SEM are not compatible, there are risks of destroying the recipe.