Metrology Solution
High-Precision Electron Beam Metrology System GT2000
CD-SEM to meet the needs of semiconductor devices development and mass production in High-NA EUV generation
Advanced CD Measurement SEM CS4800
A sustainable CD measurement solution to a wide range of 4, 6, and 8 inch wafer Fabs
Advanced High Voltage CD-SEM “CV6300 Series”
CV6300 Series is the advanced in-line measurement system that realized a 45kV acceleration voltage
Advanced Area Inspection SEM GS1000
For the advanced device production – Large FOV area inspection SEM