High Voltage CD-SEM CV7300
- CV7300 enables measurements of high aspect ratio deep holes and trench bottom dementions to control the manufacturing of beyond 200 layers 3D NAND flash memory.
- High speed and high precision overlay measurements for the advanced DRAM and Logic device.
Features
- CV7300 is an in-line measurement system that realized 60kV acceleration voltatge
- Measurement throughput has been improved by approximately 20% compared to the previous mode
- The precision improvement in dimensions and overlay measurements has been achieved, as well as a reduction of measurement variation among systems
