Metrology Solution

High-Precision Electron Beam Metrology System GT2000

CD-SEM to meet the needs of semiconductor devices development and mass production in High-NA EUV generation

Advanced CD Measurement SEM CG7300

For the EUV era device production – High Reliability CD-SEM

Advanced CD Measurement SEM CS4800

A sustainable CD measurement solution to a wide range of 4, 6, and 8 inch wafer Fabs

High Voltage CD-SEM CV7300

An in-line measurement system with 60kV acceleration voltage

Advanced High Voltage CD-SEM “CV6300 Series”

CV6300 Series is the advanced in-line measurement system that realized a 45kV acceleration voltage

Advanced Area Inspection SEM GS1000

For the advanced device production – Large FOV area inspection SEM