Multifunctional Probe Microscopy Platform AFM100 series

The AFM100 Series is Hitachi’s next generation probe microscopy platform. The AFM100 Plus and AFM100 systems that make up this series have been designed to expand the capabilities and performance of atomic force microscopy, while providing an easy-to-use platform suitable for users of all experience levels.
Experience the finest reliability and innovation with the AFM100 Series.

Features Specifications Citations

Features

Pre-mounted cantilevers make replacement EASY(option)

Automated measurement & analysis with one-click autopilot function

Correlative SEM-EDS Analysis with our AFM Marking Function

Analyze the same region of interest (ROI) with SEM, EDS, and AFM: More Information = Better Results!

Automated AFM Marking Features with Navigation Software.

・Automated AFM Marking Features with Navigation Software. — ※SÆMic. is a generic term for SEM-AFM correlative analysis recommended by Hitachi High-Tech.

[Evaluating AFM-KFM-SEM-EDS of Aluminum Alloy before and after Corrosion]

Specifications

AFM100 Plus/AFM100 System Specifications
	AFM100 Plus	AFM100
Detection System/Light Source	Optical lever/SLD (Super luminescent diode)
Lever holder	Premount holder^, multi-holder^
Basic Specifications	RMS noise level: ≦0.03 nm, in-plane drift: ≦0.03 nm/sec
Sample size	Max. 35 mmφ, thickness 10 mm, (max. 50 mm sq., thickness 20 mm)^*
Scanner (Scan range)^*	(XY:20 μm/Z:1.5 μm, XY:100 μm/Z:15 μm, XY:150 μm/Z:5 μm)^*(Included with a 5-year warranty)
Light microscope	Microscope with zoom function (Field of view XY:1.8 x 1.38 to 0.26 x 0.2 mm)^* Simple optical microscope (Field of view XY:1.6 x 1.2 mm)^*	Simple optical microscope (field of view XY:1.6 × 1.2 mm)
Basic functions	AFM, DFM, PM, FFM, SIS-shapes/properties, Q-value control	AFM, DFM, PM, FFM, SIS-shapes
Vibration isolation and noise isolation mechanism	Passive vibration isolation air table and sound-proof cover	Standard tabletop
Sample transfer mechanism	Manual Stage XY:±2.5 mm, Impact Stage Set (Conductive Type)^*
Measurement environment	Atmosphere, in liquid^, heated^ (room temperature to 250 °C), heated in liquid^* (room temperature to 60 °C)
Other functions	Self-check function, software download service, AFM marking^*
Power Supply Specifications	AC 100 V ± 10 V, 15 A, 1 line, D inoculated grounded receptacle