Spin Processor (MSP-1)
This spin processor is suitable for R&D and small production.
All processes from chemical process to dryer are in one cup.
Configuration
Features
- Minimum footprint
- Accurate wet process by single wafer processing
- Possible consistent treatment from chemical treatment to dry
- Your request to the combined full custom rooms available
- Si wafer, glass substrate, compound wafer and so on is applied.
- Round wafer and square wafer is applied
- The processing configuration layout along your request to be constructed
- Inorganic acid inorganic alkali organic acid organic alkali function water can be use
- Possible to save costs associated with a chemical solution recycling (by the processing work)
- Brush scrub,ultrasonic cleaning,FOUP,SMIF and underwater loader is available.
- You can choose many options for example chemical supply system.
