Multi Spin Processor (MSP-2)
Multi spin processor is suitable for mass production and Multi complex process.
Configuration
Features
- Wide processing by various unit combination
- Accurate wet process by single wafer processing
- Can respond to process changes and the like in a short period of time by each unit exchange, modify (by the device configuration)
- Your request to the combined full custom rooms available
- Si wafer, glass substrate, compound wafer and so on is applied.
- Round wafer and square wafer is applied
- Processing configuration layout along your request be constructed
- Inorganic acid inorganic alkali organic acid organic alkali function water can be use
- Possible to save costs associated with a chemical solution recycling (by the processing work)
- Brush scrub,ultrasonic cleaning,FOUP,SMIF and underwater loader is available.
- You can choose many options for example chemical supply system.
