RecipeDirector / DesignGauge-AnalyzerPlus
RecipeDirector:
Offline automated recipe creation without using a wafer by utilizing design data
DesignGauge-AnalyzerPlus:
Advanced data analysis station for CD-SEM images
RecipeDirector
- Utilizing design data on RecipeDirector provides automatic setting of coordinates of addressing points, auto focus point, and measurement cursor boxes without specific know-how
- This leads to short time recipe creation and improvement in CD-SEM availability
DesignGauge-AnalyzerPlus
- DesignGauge-AnalyzerPlus is the advanced data analysis station which provides offline post measurement, contour extraction using SEM images and measurement result acquired from CD-SEM
