Terminal PC Software
This software improves the operating efficiency of your CD-SEM.
Features
The Terminal PC is networked with multiple CD-SEMs which are located within clean rooms in fabrication areas. It allows operator(s) in offices (outside the celan rooms) to download the measurement data. It also allows off-line work such as display/review of measurement data, off-line measurements, check of parameters in recipes for automated measuremens, check and analysis of error generations due to recipes without using nor interrupting CD-SEMs.
Main functions and software modules
The software is available in Full and Lite versions.
| Module | Function | Full | Lite | |
|---|---|---|---|---|
| 1 | Transfer software | Automatic and/or manual transfer of measurement result files and image files from a CD-SEM to the Terminal PC. | ✓ | ✓ |
| 2 | Recipe evaluation software | Displays performance and error information for each recipe in Excel® | ✓ | N/A |
| 3 | Recipe viewer software | Displays all recipe information | ✓ | N/A |
| 4 | Data processing software | Customerized Excel Macros for evaluation or presentation of data. | ✓ | ✓ |
| 5 | Off-line measurement software | Re-measurement of images on the Terminal PC without interrupting CD-SEMs. | ✓ | N/A |
| 6 | Recipe transfer software | Transfers recipes to other equipment | Optional | Optional |
Note: Excel is a registered trademark of Microsoft Corporation in the United States and other countries.
Devices supported
- S-8000 series (S-8820/8840/8C40)
- S-9200 series (S-9200/9220/9260/9260A)
- S-9300 series (S-9300/9360/9380/9380II)
- CG series (CG4000/4100/4500/5000)
