Scanning Probe Microscopes (SPM/AFM)
Hitachi AFM will prove useful at any stage
View by applications
Automation / Ease of use
High accuracy / High resolution
- High-accuracy measurements of slanted surfaces with a steep slope
- High-accuracy measurements without damaging samples
- High-resolution measurements in a vacuum
- Stable and accurate measurements during sample heating and cooling
- High-accuracy topography measurements
- High-sensitivity MFM measurements in ambient or vacuum environments
- Humidity control / observations in liquid
Physical property measurements /
Environmental Controls
- Measurements of work functions in ambient or vacuum environments
- Observations of dopant distribution
- Quantitative measurements of elastic modulus
- Observations of structural changes in a vacuum
- Enabled true observations of topography and other physical properties
- Enabled quantitative measurements during sample heating and cooling
Technology
Product comparison
Product name
Basic functions
Function expandability*
Applicable environments
Fine positioning mechanism for samples
Sample sizes
(AFM100):AFM, DFM, PM, FFM, SIS-shapes
(AFM100 Plus):AFM, DFM, PM, FFM, SIS-shapes/properties, Q-value control
(AFM100 Plus):AFM, DFM, PM, FFM, SIS-shapes/properties, Q-value control
SIS-ACCESS, LM-FFM, VE-AFM, Adhesion, MFM, EFM, KFM,
PRM, Nano/Pico-Current, SSRM, Pico-STM*(AFM100 Plus only)
Atmosphere, in liquid*, Heated*
(*RT - 250°C), heated in liquid (RT -60°C)
Manual stage XY: ±2.5 mm
Impact stage (conductive type)
Impact stage (conductive type)
Maximum 35 mm diam., thickness 10 mm
(max. 50 mm sq., thickness 20 mm)*
(max. 50 mm sq., thickness 20 mm)*
AFM, DFM, PM Phase, FFM
SIS topography, SIS material properties, LM-FFM,
VE-AFM, Adhesion, Current, Pico-Current, SSRM, PRM, KFM, EFM(AC),
EFM(DC), MFM
Atmosphere
Precise motor-driven stage
Observable region: Entire 100 mm (4 inches)
Stroke: Y ± 50 mm, Z ≥21 mm
Minimum Step: XY 2 μm, Z 0.04 μm
Observable region: Entire 100 mm (4 inches)
Stroke: Y ± 50 mm, Z ≥21 mm
Minimum Step: XY 2 μm, Z 0.04 μm
Maximum 100 mm diam, thickness 20 mm
AFM, DFM, PM, FFM
SIS, STM, LM-FFM, VE-AFM, Adhesion, Current, SSRM,
SNDM, PRM, KFM, EFM, MFM
Ambient, vacuum*, submerged in
liquid*, Humidity*
Heating and cooling*
（-120 - 300°C /RT - 800°C)
Heating and cooling*
（-120 - 300°C /RT - 800°C)
Manual stage
XY: ±2.5 mm
XY: ±2.5 mm
Maximum 25 mm diam., thickness 10 mm
*Optional