Fluorescent X-ray (XRF) Coating Thickness Gauge FT110A
The FT110A XRF Coating Thickness Gauge has a new auto focus function which automatically focuses on the sample to acquire optical image within a few seconds. No manual adjustment is required, which results in higher throughput.
Features
Easy operation
Once a sample is placed on the stage, an optical image of the sample is automatically displayed.
Precisely measures 50 nm Au coating thickness in 10 seconds
Optimum geometry provides higher sensitivity even under a micro beam, enabling higher measurement accuracy with a round 0.1 or 0.2 mm collimator.
Measurement without the standard sample
Measurement can be done without thickness standard sample(s) by expanding the FP software. Measurement of multilayer film and alloy film can be performed easily.
Easy positioning using the Wide View System (option)
With the new Wide View System (option), the whole sample image can be observed (size max. 250x200 mm) and the desired measurement area can be specified.
Specifications
| Type | FT110A |
|---|---|
| Elements | Atomic Numbers 22(Ti) to 83(Bi) |
| X-ray source | Air-cooled small X-Ray Tube Voltage : 50 kV Current:1 mA |
| Detector | Proportional Counter |
| Collimator | Round. 0.1 mm, 0.2 and two other types |
| Sample Observation | CCD camera (with wide view system) |
| Sample image focus | Laser Pointer |
| Filter | Primary filter automatic switching |
| Sample Stage | [Stage size] 500(W)×400(D)×150(H) mm [Traveling] X : 250 mm, Y : 200 mm |
| Controller | Desktop Computer with 19 inch LCD Monitor |
| Application Software | Thin Film FP (All types of thin films: Max 5 layers,10 elements per layer), Calibration |
| Data Process | Microsoft Excel, Microsoft Word |
| Safety Functions | Sample door interlock, Sample crash prevention mechanism, Diagnostic Function |
Options
- Image Processing Software
- Bulk FP method (Material component analysis)
- Bulk Calibration method (Coating solution analysis)
* "Microsoft", "Excel" and "Word" are registered trademarks of Microsoft Corporation in the United States and other countries.
Introducing measurement examples by film thickness measurement equipment.
