X-ray (XRF) Coating Thickness Gauge FT160 Series
Equipped with polycapillary X-ray focusing optics and a silicon drift detector, FT160 enables high preciseness and high throughput in nano-order level coating thickness measurement of electronic parts.
Features
Polycapillary X-ray focusing optics
Accomplishing highly precise measurement by irradiate high-luminance primary x-ray to the area of about 30 μmφ.
Silicon Drift Detector (SDD) as detection system
High count rate silicon drift detector enables highly precise measurement.
Automatic measurement assistant function
Precise multi-point automatic measurement function helps high efficiencies of the measurement.
Easy operation enabled with simple interface and help function of the software
Daily routine measurements can be conducted easily by using registered application-like recipe.
Safety-conscious instrument design
Adoption of closed housing greatly minimizes the risk of x-ray leakage.
Wide door design improves visibility of the sample and operability of the instrument.
Specifications
| Model | FT160S | FT160Sh | FT160 | FT160h | FT160L | FT160Lh |
|---|---|---|---|---|---|---|
| X-ray source | Standard | High-energy | Standard | High-energy | Standard | High-energy |
| Mo | W | Mo | W | Mo | W | |
| Elements | Atomic No. 13(Al) to 92(U) | |||||
| Sample stage (mm) | 300(W) × 245(D) | 420(W) × 320(D) | 620(W) × 620(D) | |||
| Maximum sample size (mm) | 300(X) × 245(Y) × 80(Z) | 400(X) × 300(Y) × 100(Z) | 600(X) × 600(Y) × 20(Z) | |||
Introducing measurement examples by film thickness measurement equipment.
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