FE-SEM (Field Emission Scanning Electron Microscopes)

The SU9000 achieved the world’s highest resolution^＊1 of 0.4 nm at 30 kV accelerating voltage through a large number of fundamental performance enhancements including a high-brightness electron gun and a low-aberration lens.
Now, Hitachi High-Tech announces the SU9000II, which can achieve a resolution of 0.7 nm even at 1.0 kV landing voltage (with deceleration feature option).
To allow for stable data acquisition at the instrument‘s highest performance levels, the SU9000II offers new capabilities that render automated adjustments of the optical system—and the new EM Flow Creator software package as an option to render automated data acquisition, particularly sequential data collection.

The SU8700 brings in a new era of ultrahigh-resolution Schottky field emission scanning electron microscopes to the long-standing Hitachi EM line-up. This revolutionary FE-SEM platform incorporates multifaceted imaging, high-probe current, automation, efficient workflows for users of all experience levels, and more.

The SU8600 brings in a new era of ultrahigh-resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM line-up. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more.

The SU7000 is designed to allow simultaneous acquisition of multiple secondary and backscattered electron signals, and enables rapid capture of many types of signals. With the ability to display and store up to 6 signal channels simultaneously, the SU7000 offers unsurpassed imaging performance. In addition, it provides a flexible of specimen chamber and vacuum system to support the broad range of observational conditions. Moreover, the electron gun—with its built-in Schottky emitter—can provide irradiating beam currents of up to 200 nA. The SU7000 is built to accommodate the full diversification of future analytical methods.

SU5000 combines Schottky emission electron source and out-lens objective lens for high resolution imaging and diverse analyses of samples with various sizes and compositions. Its drawer type stage allows applications with special stages such as heating, tensile, and so on. Unique user interface, EM Wizard supports best SEM experience of every user.

The SU3900SE/SU3800SE Series Microscopes are FE-SEMs that offer high-resolution observation capabilities. They combine easy data acquisition through simple operation with much larger and heavier specimens than existing FE-SEMs. This makes it possible to observe large and heavy specimens including industrial materials such as iron and steel, automotive parts, and aerospace-related parts.

MirrorCLEM, a simple solution for correlative light and electron microscopy (CLEM).

ACAT automatically adjusts, aligns, and captures a specific region of interest (ROI) across multiple serial sections. Images are automatically acquired by specifying a ROI from a low-magnification SEM image or specifying the intercept position from an optical image/overlay.