Scanning Spread Resistance Microscope(SSRM)
Local resistance distribution on the sample surface at the wide range amplifier greater than 6th order is observed by using a hard cantilever of high conductivity and measuring the micro-current at the contact position with the probe by applying a bias voltage to the sample. The practical semiconductor dopant concentration range is sufficiently covered.
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![Mos transistor](/global/en/media/ssrm_02_jpg_tcm27-23241.jpg)
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Schematic Animation of SSRM Observation
Cathode materials for Li‐ion batteries
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The electric resistance distribution of highly conductive Al foil and various cathode materials (micro‐cathode active materials, a conductive assistant, and resin binders) on both sides are clearly observed in the SSRM image.